AW Series
The high-precision silicon wafers with thermocouples for the development of semiconductor manufacturing equipment, process condition setting, and temperature distribution measurement.
- Precision hole drilling on the wafer ensures high-precision thermal contact position.
- All products come with a test report as a standard specification.
- A wide variety of 27 types in total (excluding cord and terminal combinations).
Wafer size: 3 types (5 / 8 / 9 inches)
Number of thermocouple sensor points: 3 types (1 / 5 / 9 points)
Thermocouple insulation (Teflon / Alumina Fiber Sleeve / Quartz Tube) - Other custom-made products are also available.
Model number
Please select numbers 1 to 5 from the following to form the model. If you need to customize specifications other than those below, please contact us.
| Item | Number | Description |
|---|---|---|
| 1 Wafer Size | 5 | 5 inches |
| 8 | 8 inches | |
| 12 | 12 inches | |
| 2 Thermocouple Points | 1 | 1 point |
| 5 | 5 points | |
| 9 | 9 points | |
| 3 Insulating Material | T | Teflon (50～250℃) |
| A | Alumina Fiber Sleeve (50～490℃) | |
| S | Quartz Tube (50～490℃) | |
| 4 Cord Length | 1 | 1m (3.28ft) |
| 1.5 | 1.5m (4.92ft) | |
| 2 | 2m (6.56ft) | |
| 2.5 | 2.5m (8.20ft) | |
| … | …Specify any length | |
| 5 Plug Type | ASP | Standard plug (same metal as thermocouple) |
| ANP | Miniature plug (same metal as thermocouple) | |
| W | Cut-off | |
| WT3 | Y terminal for M3 (general electrode material) | |
| WT4 | Y terminal for M4 (general electrode material) | |
| WT5 | Y terminal for M5 (general electrode material) | |
| WC3 | Round hole terminal M3 (general electrode material) | |
| WC4 | Round hole terminal M4 (general electrode material) | |
| WC5 | Round hole terminal M5 (general electrode material) | |
| ANJY3 | Y terminal for M3 (same metal as thermocouple) | |
| ANJY4 | Y terminal for M4 (same metal as thermocouple) | |
| ANJC3 | Round hole terminal M3 (same metal as thermocouple) | |
| ANJC4 | Round hole terminal M4 (same metal as thermocouple) | |
| WA | Banana terminals (general electrode materials) |
- ASP
- ANP
- W
- WT
- WC
- ANJY
- ANJC
- WA
Specifications
| Model (Select the number for each "*") | AW-***K-T | AW-***K-A | AW-***K-S | |
|---|---|---|---|---|
| Thermocouple Type | K | |||
| Operating Temperature Range (of Wafer and Insulating part) | 0～260℃ | 0～500℃ | 0～500℃ | |
| Tolerance | 0℃ or more 100℃ or under | ±2.5℃ | ±2.5℃ | ±2.5℃ |
| 100℃ over 200℃ or under | ±2.5℃ | ±5.0℃ | ±5.0℃ | |
| 200℃ over 300℃ or under | ±2.5℃ (260℃ or under) | ±6.0℃ | ±6.0℃ | |
| 300℃ over 400℃ or under | — | ±7.0℃ | ±7.0℃ | |
| 400℃ over 500℃ or under | — | ±8.0℃ | ±8.0℃ | |
| Point(s) for Test Report | 100, 150, 200, 250℃ | 100, 200, 300, 400, 490℃ | ||
| Wafer Size | 5 / 8 / 12 inches (available other sizes as an option) | |||
| Thermocouple Wire Diameter | φ0.13mm | |||
| Thermocouple Insulation Material | Teflon | Alumina Fiber Sleeve | Quartz Tube | |
| Temperature Range for General Calibration (by manufacturer)*Optional | 50～250℃ | 50～490℃ | 50～490℃ | |
| Repair | Repairable | |||
Recommended products to use with the AW series
Thermologger AM-9000 series
