Wafer Surface Temperature Measurement Solutions
Reliable Contact Temperature Measurement for Semiconductor Wafers
Accurate wafer surface temperature measurement is essential for semiconductor process evaluation, stage temperature verification, equipment inspection, and quality control.
Anritsu offers two main contact sensor solutions for wafer temperature measurement:
- WE Series self-weight contact sensors
- ST Series tape-type sensors
The appropriate sensor can be selected according to the measurement method, required sensor position, and test conditions.
Why Contact Measurement Is Recommended for Wafers
Contact sensors directly detect the wafer surface temperature, helping reduce the influence of optical surface conditions. They are suitable for process evaluation, stage temperature verification, and temperature distribution measurement where stable and repeatable results are required.
Measurement Challenges for Wafers
| Challenge | Contact Measurement Solution |
|---|---|
| Reflectivity and emissivity | Reduces the influence of optical surface properties |
| Fragile wafer surface | Uses sensors suited to delicate wafer surfaces |
| Temperature distribution | Supports measurement at selected or multiple points |
| Repeatability | Helps improve repeatability through consistent sensor positioning and contact conditions |
WE Series — Self-Weight Contact Sensors
The WE Series measures temperature by placing the sensor directly on the wafer.
It can be removed immediately after measurement or moved to another position.
Ideal for:
- Quick temperature checks
- Repeated placement and removal
- Measurements at different positions
- Applications requiring minimal preparation
Learn more about the WE series.
WE Series Weighted Surface probe
Easy to use. With its self-weighted feature, it's good when you cannot keep your hands over the object to be measured such as a wafer stage, a grill, a hot plate etc.
This is also the must-get products for any commercial kitchen technicians and a wafer fabrication technician.
ST Series — Tape-Type Sensors
The ST Series is attached directly to a dedicated test wafer. Initial fixation is required, but once attached, measurement can be performed simply by placing the sensor-equipped wafer on the stage.
Ideal for:
- Fixed-point measurement
- Repeated testing under the same conditions
- Temperature distribution measurement
- Multi-point measurement
We can also provide a custom attachment assembly service.
ST Series Flat Leaf Probes
Model ST series probes are multi-purpose temperature sensors featuring a flexible tape shape.
They can be glued to the surfaces of measurement targets for use in a range of applications.
Specific components may be combined to customize products for the needs of a customer's specific application.
Learn more about the ST Series.
Sensor Selection Guide
| WE Series | ST Series | |
|---|---|---|
| Sensor type | Self-weight | Tape type |
| Installation | Place on the wafer | Attach to a test wafer |
| Preparation | Minimal | Initial fixation required |
| Position changes | Easy | Reattachment required |
| Recommended use | Quick and flexible checks | Fixed-position and repeated tests |
HR Series
HR Series thermometers can be used with compatible Anritsu temperature probes to support accurate and reliable temperature measurement in production, inspection, and quality control environments.
Need help selecting the right probe and thermometer?
Contact us today to discuss your wafer surface temperature measurement application.